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Content associated with ARDI
ARDI offers access to scholarly literature from diverse fields of science and technology. It promotes the integration of developing and least developed countries into the global knowledge economy, reinforcing the knowledge infrastructure and supporting researchers in creating and developing new solutions to technical challenges on a local and global level.
! Optical Micro- and Nanometrology in Microsystems Technology
Editor(s):
Gorecki, Christophe
Information Provider:
SPIE Digital Library
ISBN: 9780819462442
Publication Date:
2006
Book
! Optical Micro- and Nanometrology in Microsystems Technology II
Editor(s):
Gorecki, Christophe
Information Provider:
SPIE Digital Library
ISBN: 9780819471932
Publication Date:
2008
Book
! Optical Micro- and Nanometrology IV
Editor(s):
Gorecki, Christophe
Information Provider:
SPIE Digital Library
ISBN: 9780819491220
Publication Date:
2012
Book
! Optical Micro- and Nanometrology V
Editor(s):
Gorecki, Christophe
Information Provider:
SPIE Digital Library
ISBN: 9781628410808
Publication Date:
2014
Book
! Optical Micro- and Nanometrology VI
Editor(s):
Gorecki, Christophe
Information Provider:
SPIE Digital Library
ISBN: 9781510601352
Publication Date:
2016
Book
! Optical Micro- and Nanometrology VII
Editor(s):
Gorecki, Christophe
Information Provider:
SPIE Digital Library
ISBN: 9781510618824
Publication Date:
2018
Book
! Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892528462
Publication Date:
1987
Book
! Optical Microlithography and Metrology for Microcircuit Fabrication
Editor(s):
Lacombat, Michel
Information Provider:
SPIE Digital Library
ISBN: 9780819401748
Publication Date:
1989
Book
! Optical Microlithography I: Technology for the Mid-1980s
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892523696
Publication Date:
1982
Book
! Optical Microlithography II: Technology for the 1980s
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892524297
Publication Date:
1983
Book
! Optical Microlithography III: Technology for the Next Decade
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892525058
Publication Date:
1984
Book
! Optical Microlithography IV
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892525737
Publication Date:
1985
Book
! Optical Microlithography IX
Editor(s):
Fuller, Gene
Information Provider:
SPIE Digital Library
ISBN: 9780819421029
Publication Date:
1996
Book
! Optical Microlithography V
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892526680
Publication Date:
1986
Book
! Optical Microlithography VI
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892528073
Publication Date:
1987
Book
! Optical Microlithography X
Editor(s):
Fuller, Gene
Information Provider:
SPIE Digital Library
ISBN: 9780819424655
Publication Date:
1997
Book
! Optical Microlithography XI
Editor(s):
Van den Hove, Luc
Information Provider:
SPIE Digital Library
ISBN: 9780819427793
Publication Date:
1998
Book
! Optical Microlithography XII
Editor(s):
Van den Hove, Luc
Information Provider:
SPIE Digital Library
ISBN: 9780819431530
Publication Date:
1999
Book
! Optical Microlithography XIII
Editor(s):
Progler, Christopher
Information Provider:
SPIE Digital Library
ISBN: 9780819436184
Publication Date:
2000
Book
! Optical Microlithography XIV
Editor(s):
Progler, Christopher
Information Provider:
SPIE Digital Library
ISBN: 9780819440327
Publication Date:
2001
Book
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