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Content associated with ARDI
ARDI offers access to scholarly literature from diverse fields of science and technology. It promotes the integration of developing and least developed countries into the global knowledge economy, reinforcing the knowledge infrastructure and supporting researchers in creating and developing new solutions to technical challenges on a local and global level.
! Optical Microlithography I: Technology for the Mid-1980s
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892523696
Publication Date:
1982
Book
! Optical Microlithography II: Technology for the 1980s
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892524297
Publication Date:
1983
Book
! Optical Microlithography III: Technology for the Next Decade
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892525058
Publication Date:
1984
Book
! Optical Microlithography IV
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892525737
Publication Date:
1985
Book
! Optical Microlithography IX
Editor(s):
Fuller, Gene
Information Provider:
SPIE Digital Library
ISBN: 9780819421029
Publication Date:
1996
Book
! Optical Microlithography V
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892526680
Publication Date:
1986
Book
! Optical Microlithography VI
Editor(s):
Stover, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780892528073
Publication Date:
1987
Book
! Optical Microlithography X
Editor(s):
Fuller, Gene
Information Provider:
SPIE Digital Library
ISBN: 9780819424655
Publication Date:
1997
Book
! Optical Microlithography XI
Editor(s):
Van den Hove, Luc
Information Provider:
SPIE Digital Library
ISBN: 9780819427793
Publication Date:
1998
Book
! Optical Microlithography XII
Editor(s):
Van den Hove, Luc
Information Provider:
SPIE Digital Library
ISBN: 9780819431530
Publication Date:
1999
Book
! Optical Microlithography XIII
Editor(s):
Progler, Christopher
Information Provider:
SPIE Digital Library
ISBN: 9780819436184
Publication Date:
2000
Book
! Optical Microlithography XIV
Editor(s):
Progler, Christopher
Information Provider:
SPIE Digital Library
ISBN: 9780819440327
Publication Date:
2001
Book
! Optical Microlithography XIX
Editor(s):
Flagello, Donis
Information Provider:
SPIE Digital Library
ISBN: 9780819461971
Publication Date:
2006
Book
! Optical Microlithography XV
Editor(s):
Yen, Anthony
Information Provider:
SPIE Digital Library
ISBN: 9780819444370
Publication Date:
2002
Book
! Optical Microlithography XVI
Editor(s):
Yen, Anthony
Information Provider:
SPIE Digital Library
ISBN: 9780819448453
Publication Date:
2003
Book
! Optical Microlithography XVII
Editor(s):
Smith, Bruce
Information Provider:
SPIE Digital Library
ISBN: 9780819452900
Publication Date:
2004
Book
! Optical Microlithography XVIII
Editor(s):
Smith, Bruce
Information Provider:
SPIE Digital Library
ISBN: 9780819457349
Publication Date:
2005
Book
! Optical Microlithography XX
Editor(s):
Flagello, Donis
Information Provider:
SPIE Digital Library
ISBN: 9780819466396
Publication Date:
2007
Book
! Optical Microlithography XXI
Editor(s):
Levinson, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780819471093
Publication Date:
2008
Book
! Optical Microlithography XXII
Editor(s):
Levinson, Harry
Information Provider:
SPIE Digital Library
ISBN: 9780819475275
Publication Date:
2009
Book
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